Nonlinear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches
نویسندگان
چکیده
منابع مشابه
Identification of nonlinear dynamic models of electrostatically actuated MEMS
This paper focuses on the identification of nonlinear dynamic models for physical systems such as electrostatically actuated micro-electro-mechanical systems (MEMS). The proposed approach consists in transforming, by means of suitable global operations, the input-output differential model in such a way that the new equivalent formulation is well adapted to the identification problem, thanks to ...
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ژورنال
عنوان ژورنال: Microwave and Optical Technology Letters
سال: 2007
ISSN: 0895-2477,1098-2760
DOI: 10.1002/mop.22450